PRESENTATION


Optimising Thermal Processing for High-Quality SiC Substrates and Epitaxy at Scale

Thermal processing plays a critical role in achieving uniformity, defect reduction and performance stability in SiC production. This presentation explores advanced furnace technologies and process optimisation strategies that support consistent substrate and epitaxial quality. The session highlights how controlled thermal environments enable higher throughput, reduced variability and enhanced device reliability for next-generation SiC power electronics.