Today’s rapidly evolving end-market application segments have centered on several key areas of future growth: the increased mobility of consumer applications, electric vehicles and 5G communications. At the core of each of these market segments are a class of GaN-based devices more specifically known as high electron mobility transistors (HEMT). These devices are indispensable in applications ranging from onboard charging in EVs to fast-charge adaptors in the mobile computing and cell phone markets to high-speed, high-power switches in base stations enabling 5G communications. Developing this class of energy-efficient device technologies requires state-of-the-art measurement and inspection technologies for precision in materials development. This presentation introduces Onto Innovation and discusses how its metrology and inspection measurement technologies, together with ecosystem software products, enable wafer measurement and real-time feedback and control of the process equipment used in the development of GaN-based technologies in high-volume manufacturing (HVM) processes.
Wei Zhao is a strategic marketing director of specialty devices at Onto Innovation. The device segments Wei covers range from MEMS to sensors, power, compounds, analog, IoT and others. Wei has served as a process engineer, integration leader and fab equipment strategist in support of semiconductor technology growth. Wei began his career in advanced logic and gained hands-on fab process module and integration experience in both planar and FinFET logic technology. With an ever-expanding knowledge of specialty device technologies as an equipment strategist, Wei has collaborated with fab process partners in specialty device segments to jointly develop equipment products that enable device performance growth. Here at Onto Innovation, he is focused on extending our company’s broad portfolio of metrology, inspection and lithography products to support the specialty device market, making semiconductor manufacturing greener, more productive and more innovative. Wei holds a B.S. and M.S. in Engineering Mechanics from the Dalian University of Technology and earned his Ph.D. in Mechanical Engineering at Stony Brook University.