Light sources and photodetectors are fueling the CS market with 3D sensing applications in Smartphones and Lidar applications for GaAs, as well as Datacom and Telecom applications for InP. Advanced thin-film deposition is critical for best performance e.g. efficiency or dark current and meeting highest reliability standards. High quality, dense and conformal layers deposited by ALD and integrated processes for surface control are addressing these challenges. Beyond traditional barrier against moisture ingress this paper describes leading edge ALD applications available at industrial scale such as advanced surface passivation for reduced interfacial states and conformal transparent conductive oxides.
Dr. Mikko Söderlund is the Head of Sales for Beneq’s semiconductor business. He has more than 20 years of experience in product development, product management, technical sales and business development across Photonics, OLED, and Semiconductor industries. Mikko received his PhD in Micro- and Nanotechnology from the Helsinki University of Technology.