Highly uniform thin films and tool stability - key drivers for future LED display production

In mature LED production factors like costs of ownership plus technical drivers like LOP (light output) and forward voltage (Vf) have been dominant. For emerging technologies like Micro LED however, the focus is on other challenges right now at this relatively early stage: The much thinner structures make thickness uniformity across the wafer and repeatability from wafer to wafer and batch to batch critical. Structures typically two orders of magnitude smaller also necessitate even better control of any film defects to achieve the device yields that will be required. Production solutions addressing these challenges will be presented.