With the current demand for power devices across multiple applications soaring, device makers are developing production solutions across multiple material sets including Silicon, Silicon Carbide, Gallium Nitride and others. With each device technology offering specific performance attributes comes a specific device architecture and inherent device processing challenges unique to both the material and device design. This presentation explores some of the key device high value problems that directly impact device performance and discusses the metrology and inspection techniques that have been developed to help address each in high volume manufacturing.
Nick Keller has been with Onto Innovation since its founding in 2019 and prior to that, Nanometrics, which merged with Rudolph Technologies to become Onto Innovation, since 2007. Nick is Director of Applications Development and has been instrumental in developing infrared critical dimension technology and providing pathfinding simulations in support of other new products at pre-initiation phases. He has seven issued patents and over 25 publications.