The ever-increasing market of electrical vehicles and power devices has created a high demand for silicon carbide (SiC) due to its superior properties compared to silicon. Semilab’s metrology systems address the critical challenges in SiC substrate, EPI and device manufacturing. This presentation explores the complexities of structure and composition, with a focus on Fourier-transform infrared spectroscopy (EIR) coupled with optical and electrical measurement use-cases. With these advances, Semilab aims to empower the wide-bandgap semiconductor industry with comprehensive metrology solutions, enabling the seamless integration of SiC technology across diverse applications while ensuring superior device performance and reliability.
Dr. Eszter Najbauer joined Semilab in 2022 as an Application Scientist in the Ellipsometry Department. Her focus is on infrared reflectometry, including development of applications as well as customer support. Eszter studied chemistry at the Eötvös Loránd University in Budapest, and completed her PhD and a postdoc in physical chemistry at the Max Planck Institute for Biophysical Chemistry in Göttingen, Germany.