We will give a short introduction to high resolution cathodoluminescence and highlight its capability to detect buried (subsurface) defects combined with nanometer scale mapping resolution. We will introduce example applications where cathodoluminescence can be used to detect defects in III-V manufacturing, research & development and failure analysis. Finally, we will present the Säntis 300, Attolight’s fully automated solution for in-line defect inspection in compound semiconductor manufacturing. We will focus on LED and other particular use cases to highlight the added value of the Säntis 300 in compound semiconductor manufacturing and R&D.
Samuel has headed Attolight since its creation in 2008 and helped to transform Attolight’s quantitative cathodoluminescence from manual lab and FA tools into full wafer fab ready tool. Samuel holds an MS of Physics from EPFL and holds a PhD in physics from the same university.