The rapidly expanding SiC power electronic market requires the installation of large production capacities for the manufacture of SiC crystals, epilayers and devices. This is also associated with a large demand for graphite parts, which are subject to a great deal of wear during the manufacturing processes. Costly high temperature and corrosion resistant protective coatings based on high purity CVD tantalum carbide (TaC) are already established in SiC epitaxy and PVT reactors. To save costs, an innovative spray coating technology developed by Fraunhofer IISB gives the opportunity to create an equally protective TaC coating on relevant graphite parts.
Dr. Matthias Trempa is a senior scientist at Fraunhofer IISB, a world wide recognized German research institute for power electronic systems and devices. Dr. Trempa studied material science at Friedrich-Alexander University Erlangen-Nuremberg and joined Fraunhofer IISB in 2008. During his research activities in the field of Silicon Crystal Growth he got his PhD in 2013. Since a couple of years, Dr. Trempa is doing applied research together with Nippon Kornmeyer Carbon Group (NKCG) on high temperature protection coatings, especially for semiconductor applications along the SiC power device value chain.