Traditionally either dual laser or DIC microscopy systems are used for SiC defect inspection and it became known that each technology has its own pros and cons. For example, dual laser system may be better for particle and shallow scratch defect capture while weak on pit and bump and PL black. A new hybrid system with dual laser and DIC microscopy combined are developed to have a better defect capture rate and better defect classification while maintaining a compatible throughput with the conventional inspection tools.
Dr. Ma is the CEO and founder of AKOptics in Beijing China. He obtained his Bachelor degree in material science from Beijing Tsinghua University in 1992 and PhD from University of Minnesota (Twin Cities, MN USA) in Electrical Engineering in 2000. Before Dr. Ma founded AKOptics in 2017, he co-founded Semitronix Inc. in Hangzhou China in 2007 which was a listed public company in ChiNext (301095) in 2022. AKOptics is a leading optical defect inspection company in China and provide defect inspection tools for LED, Compound Semiconductor and IC industry.