Assunta Vigliante
Technological Director (RSMD), Rigaku Corporation
Rigaku
Assunta Vigliante is an X-ray technology professional with over 30 years of experience in industry, academia, and national laboratories. She holds a PhD in Physics from the University of Houston, Texas, USA, and has held academic positions in the USA and Europe. Assunta later transitioned to industry, where she took on senior roles in several semiconductor companies. She is currently the Director of Technology for the Semiconductor Division at Rigaku. In addition, Assunta has served as an expert advisor for the European Commission and other professional organizations in the US and Europe.
Presentations
X-ray Metrology Solutions for Compound Semiconductors from Labs to Fabs.
X-ray characterization of compound semiconductors has been used for over three decades, extensively in the lab space and relatively limited in the fab space. However, in the past five years the demand for X-ray metrology is noticeable increased, due to the introduction of new materials for power devices like SiC and GaN, photonics, quantum computing and new complex thin film structures. In this presentation, I will provide an overview of the X-ray metrology solutions and the progress in the X-ray technology which have enabled the transition from the lab to a fab environment.