Pål Pedersen is a Brooklyn based Application Engineer at Nanotronics. He has MS degrees in Materials Science and Engineering from Lehigh University, PA and Rutgers University NJ, and a BS degree in Materials Science from UMIST, Manchester UK. At Nanotronics, Pål works closely with customers in the pre-sale phase to understand their unique applications and needs in order to scan and analyze their samples according to their needs. Post-sales, he works closely with the customers to ensure that they are able to use the nSpec® to its fullest capability and successfully fulfill its intended role. Prior to working at Nanotronics, Pål was an FIB and SEM Applications Engineer at Carl Zeiss Microscopy in Thornwood, NY.
The industrial manufacture of GaN substrates is a difficult process characterized by low yields due to defect propagation. Improving yield is paramount for scaling substrate production to meet the increasing international demands for high powered electronics. A key factor in yield improvement in processing is real-time feedback from inspection tools to assign causality and subsequently improve the manufacturing process. Therefore, the industry requires a standardized set of critical defects for the industry to monitor. Agreeing upon these standard defects will enable the inspection tool manufacturers to develop a more focused set of tools and methodologies to better serve the compound semiconductor industry. The report presents our current list standard defects, the methodology of detection, and potential improvements in inspection technology.